| URN |
etd-0830112-214915 |
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| Author |
Jhe-Yi Liao |
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| Author's Email Address |
No Public. |
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| Statistics |
This thesis had been viewed 5571 times. Download 595 times. |
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| Department |
Electro-Optical Engineering |
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| Year |
2011 |
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| Semester |
2 |
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| Degree |
Master |
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| Type of Document |
|
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| Language |
zh-TW.Big5 Chinese |
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| Title |
Fabrication and Discussion on Nano-Metal Structure |
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| Date of Defense |
2012-07-19 |
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| Page Count |
65 |
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| Keyword |
superlens
surface plasma
lift-off
E-beam lithography
nano structure
|
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| Abstract |
Abstract
Negative index structures could be implemented through surface Plasmon polariton waves generated by nanostructures. We are interested in PMMA grating structure on curved metal surface. In order to fabricate this kind of samples, a series process parameters have been tested and also the lift-off process has been developed. Our results show superlens effect under optical microscope(OM). The sub-wavelength grating image is reconstructed in the non-grating region where the PMMA dielectric layer is not uniform. Surface Plasmon(SPP) waves generated in the grating region propagate to the non-grating region and are scattered out through the non-uniform PMMA layer. The grating information is not resolvable under OM but clear in the reconstructed region. It shows that SPP waves can show super resolution and a simple batch process should be developed in the future. |
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| Advisory Committee |
Min-Hsiung Shih - chair
Chao-Kuei Lee - co-chair
Yu-Ju Hung - advisor
|
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| Files |
Indicate in-campus at 5 year and off-campus access at 5 year. |
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| Date of Submission |
2012-08-30 |
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