Title page for etd-0830112-214915


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URN etd-0830112-214915
Author Jhe-Yi Liao
Author's Email Address No Public.
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Department Electro-Optical Engineering
Year 2011
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Fabrication and Discussion on Nano-Metal Structure
Date of Defense 2012-07-19
Page Count 65
Keyword
  • superlens
  • surface plasma
  • lift-off
  • E-beam lithography
  • nano structure
  • Abstract Abstract
    Negative index structures could be implemented through surface Plasmon polariton waves generated by nanostructures. We are interested in PMMA grating structure on curved metal surface. In order to fabricate this kind of samples, a series process parameters have been tested and also the lift-off process has been developed. Our results show superlens effect under optical microscope(OM). The sub-wavelength grating image is reconstructed in the non-grating region where the PMMA dielectric layer is not uniform. Surface Plasmon(SPP) waves generated in the grating region propagate to the non-grating region and are scattered out through the non-uniform PMMA layer. The grating information is not resolvable under OM but clear in the reconstructed region. It shows that SPP waves can show super resolution and a simple batch process should be developed in the future.
    Advisory Committee
  • Min-Hsiung Shih - chair
  • Chao-Kuei Lee - co-chair
  • Yu-Ju Hung - advisor
  • Files
  • etd-0830112-214915.pdf
  • Indicate in-campus at 5 year and off-campus access at 5 year.
    Date of Submission 2012-08-30

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