Title page for etd-0810111-180132


[Back to Results | New Search]

URN etd-0810111-180132
Author Hung-Yu Peng
Author's Email Address No Public.
Statistics This thesis had been viewed 5384 times. Download 1011 times.
Department Physics
Year 2010
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Growth and Characterization of Epitaxial Graphene Grown by
Thermal Annealing 6-H SiC(001) and Chemical Vapor Deposition
Date of Defense 2011-06-17
Page Count 127
Keyword
  • Raman spectroscopy
  • Copper Foil
  • Chemical Vapor Deposition
  • SiC
  • Graphene
  • Abstract This research has discussed the graphene growth mechanism and the achievement, the main purpose is to try the best method to grow graphene which is large size, uniform, and continue. The main issue is about growth and characterizations in full text which is separated by thermal annealing 6-H SiC(001) and chemical vapor deposition on the copper foil to grow graphenen. For instances, to adjust the growth parameters and the growth methods to get graphene and to control the quality, to analysis the number of layers, to research the characterizations during growth process, and to find the better transfer method are all the important focus in this paper. The morphology of samples is studied by SEM, AFM, STM, OM and so on, further the thickness of graphene layers can be observed by AFM and STM. Due to the limit of instruments, the thickness of graphene layer (~0.35 nm) and the thickness of 6-H SiC(001) steps (~1.5 nm) are not easy to observe actually. Raman spectroscopy is the main analysis tool I have employed, it is the fast way to calculate the number of layers (G, 2D band). In addition, Raman scattering is able to know the information of electronic structure variation (2D band), to investigate the stress which is caused by substrate and to estimate the quality of graphene (D, G band). Finally, I take chemical vapor deposition to grow graphenen on the copper foil. Sample is successfully transferred onto SiO2, and the number of graphene layers is estimated to be about two and the structure is AA stacking from these data. The data also shows the graphene is large size, uniform, and continue.
    Advisory Committee
  • Yung-Sung Chen - chair
  • Wang-Chuang Kuo - co-chair
  • Li-Wei Tu - advisor
  • Chien-Cheng Kuo - advisor
  • Files
  • etd-0810111-180132.pdf
  • Indicate in-campus at 5 year and off-campus access at 5 year.
    Date of Submission 2011-08-10

    [Back to Results | New Search]


    Browse | Search All Available ETDs

    If you have more questions or technical problems, please contact eThesys