Title page for etd-0810106-142807


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URN etd-0810106-142807
Author Mau-shie Hsu
Author's Email Address allen6130@yahoo.com.tw
Statistics This thesis had been viewed 5338 times. Download 2992 times.
Department Electrical Engineering
Year 2005
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title The Study of Solidly Mounted Resonators and Filters
Using Mo/SiO2 as Bragg Reflector
Date of Defense 2006-07-18
Page Count 103
Keyword
  • AlN
  • Bulk
  • Abstract In this study, the Bragg reflectors deposited by DC and RF
    magnetron sputtering are composed of alternating layers of high and low acoustic impedance materials which have a thickness of one quarter wavelength at the desired resonance frequency, while the piezoelectric layer, aluminum nitride thin film, was deposited by RF reactive magnetron sputtering.
    The deposition parameters of Mo and SiO2 thin films are tuned according to the AFM measurement. With the optimal deposition parameters, the cross-sectional SEM images of multilayer Bragg reflector show smooth and clear interfaces which are important criterias for the SMR devices.
    The frequency responses of SMR show distinct resonant
    phenomenon near 1.4GHz and 2.5GHz with an excellent noise
    restraint. It indicates that the Bragg reflector made of Mo/SiO2 is suitable for the fabrication of SMR devices. Furthermore, the two resonant frequencies show that the bulk acoustic wave transmit in two different way, the longitudinal mode and the shear mode. The cause of the shear mode vibration is the tilt of the c-axis of AlN thin
    films. For c-axis inclined AlN thin films, the longitudinal and the shear mode vibration both exist, and the acoustic wave propagates with different acoustic velocities along the c-axis inclined AlN.
    Advisory Committee
  • Jung-chuan Chou - chair
  • Yeong-her Wang - co-chair
  • Rurng-sheng Guo - co-chair
  • Chien-chuan Cheng - co-chair
  • Ying-chung Cheng - advisor
  • Files
  • etd-0810106-142807.pdf
  • indicate access worldwide
    Date of Submission 2006-08-10

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