Title page for etd-0805113-220336


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URN etd-0805113-220336
Author Jun-jie Li
Author's Email Address No Public.
Statistics This thesis had been viewed 5330 times. Download 659 times.
Department Mechanical and Electro-Mechanical Engineering
Year 2012
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Effects of Ultrasonic Frequency Variation on the Micro Copper Bumps Friction Phenomena in the Couples-polishing Activation Bonding Process of 3D IC Package
Date of Defense 2013-07-15
Page Count 94
Keyword
  • couples-polishing activation bonding (CAB) process
  • 3D integrated circuits (ICs)
  • copper-bonding process
  • ultrasonic vibration
  • Abstract Since the development of high-density integrated circuits (ICs), numerous studies have used 3D IC bonding technology to reduce processing temperatures and increase reliability. However, numerous stringent environmental conditions have been established for low-temperature processes. This has increased costs and created additional processing steps. Recently, researchers have proposed a couples-polishing activation-bonding (CAB) process. This process involves using ultrasonic vibration technology to induce interfacial friction, thereby increasing temperatures at the interface. Subsequently, atomic diffusion leaving copper contacts generate engagement. This process can be performed at room temperature.
      In this study, the finite-element method was used to establish a micro-copper block ultrasonic-vibration-bonding 3D simulation model. In addition, the effects of various ultrasonic-vibration frequencies on the stress, strain, and temperature fields of the interface were explored, and the effects of the coefficients of friction and amplitude on interface strain were analyzed.
      The simulation results showed that at 50 kHz, the bonding process was successful after 1500 μs. The equivalent stress could be divided into stress upward, stress downward, and stress stabilization phases. Based on the results, it may be suggested that ultrasound-vibration frequencies affect energy transfer rates. The results obtained at 50 kHz showed that the outermost strain was less than 23% of the center strain.
    By increasing the frequency, a critical frequency was determined regarding the period necessary to obtain a steady stress rate.
      Finally, when the friction coefficient and amplitude were changed, at a fixed frequency, the coefficient of friction rose from 0.1 to 0.15, which was a larger increase in strain than 0.15 to 0.2. Regarding amplitude changes, when the frequency was low, the amplitude exhibited an increased effect on the maximum equivalent strain.
    Advisory Committee
  • Ting-Lang Hsiao - chair
  • Rung-Hung Suen - co-chair
  • Chung-Ting Wang - co-chair
  • Chi-Hui Chien - advisor
  • Files
  • etd-0805113-220336.pdf
  • Indicate in-campus at 0 year and off-campus access at 1 year.
    Date of Submission 2013-09-05

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