Title page for etd-0804111-155735


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URN etd-0804111-155735
Author Wei-Jen Chen
Author's Email Address No Public.
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Department Materials and Optoelectronic Science
Year 2010
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Growth of (0002) ZnO Films on LiGaO2 (001) substrate by chemical vapor deposition method
Date of Defense 2011-07-18
Page Count 65
Keyword
  • (0002)plane
  • LiGaO2
  • ZnO
  • CVD
  • polar
  • Abstract In the thesis, epitaxial ZnO films were grown by chemical vapor deposition method (CVD) on LiGaO2 (001) substrate. Zinc 2,4-pentanedionate monohydrate [Zn (C5H7O2) 2. H2O] , used as the zinc precursor, was vaporized at the temperature between 130 to 140℃. Then the vapor was carried by a mixture of N2/O2 gas flow into the furnace where the (001) LGO substrate located. The parameters of growth temperature, growth pressure and growth time were adjusted to found the best ZnO films growth conditions.
    After CVD growth, the crystal structure, crystal quality, surface morphology, optical properties, surface roughness and micro-structure properties of the specimens were analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM), photoluminescence (PL), atomic force microscopy (AFM) and transmission electron microscopy (TEM).
    This study was divided into three parts. In the first parts, the dependence of growth characteristics on the different growth temperatures was investigated. The best surface morphology and crystal quality of ZnO films were grown under the growth temperature of 550 ℃. In the second parts, the growth of ZnO films under various pressures was investigated. High orientation (0002)ZnO films were grown at lower growth pressure of 50 torr. In the third parts, the dependence of growth time on the ZnO films quality was investigated under growth temperature of 550 ℃and growth pressure of 50 torr.
    Advisory Committee
  • De-shin Gan - chair
  • Ji-jen Wu - co-chair
  • Liu-wen Chang - co-chair
  • Ming-chi Chou - advisor
  • Files
  • etd-0804111-155735.pdf
  • Indicate in-campus at 5 year and off-campus access at 5 year.
    Date of Submission 2011-08-04

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