Title page for etd-0803118-115227


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URN etd-0803118-115227
Author Zih-min Chen
Author's Email Address No Public.
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Department Materials and Optoelectronic Science
Year 2018
Semester 1
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Study on thin film and heterostructure growth of Cu2O/ZnxMg1-xO on MgO substrate
Date of Defense 2018-08-27
Page Count 140
Keyword
  • Cu2O
  • ZnO
  • ZnxMg1-xO
  • MgO substrate
  • Molecular beam epitaxy
  • Abstract Cu2O/ZnxMg1-xO epilayers and heteroepitaxial structures were grown on MgO substrates with low lattice mismatch by molecular beam epitaxy. MgO substrates with three orientations: (100), (110) and (111) were used. Special emphasis on the effect of various pre-treatments on the surface morphology and roughness of the substrate surface is studied. The surface morphology of the MgO substrate surface was characterized by atomic force microscopy (AFM). The composition, orientation and crystallinity of the ZnxMg1-xO and Cu2O films were analyzed by X-ray diffraction (XRD)、scanning electron microscopy (SEM)、energy dispersive x-ray spectroscopy (EDS) and UV-Vis spectrometer.
    AFM results showed that no terrace structure could be observed on the as-polished (100) surface though its root-mean-square roughness was low. After annealing, the step-and-terrace structure was present associated with particles of tens of nanometers in diameter. These particles could be removed by polishing in water. A smooth and particle-free surface was thus obtained by high temperature annealing and water polishing. The (110) surface exhibited high density of holes which were removed by high temperature annealing. Finally, the as-polished (111) surface filled with scratches and a high roughness value, probably due to its polar character. After annealed at 1000 oC for 24 hours, the terrace structure was resolved though the average roughness is still high. ZnxMg1-xO epilayers with x>0.70 and Cu2O/ ZnxMg1-xO heterostructure were successful grown on the (100), (110) and (111) MgO substrates.
    Advisory Committee
  • Shi-Hsin Lin - chair
  • Huan-Chien Tung - co-chair
  • Liuwen Chang - advisor
  • Files
  • etd-0803118-115227.pdf
  • Indicate in-campus at 5 year and off-campus access at 5 year.
    Date of Submission 2018-09-03

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