Title page for etd-0801116-112126


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URN etd-0801116-112126
Author Chien-huan Chu
Author's Email Address No Public.
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Department Electrical Engineering
Year 2015
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Fabrication and characteristics of 2.5GHz solidly mounted film bulk acoustic wave filters with laser annealing process
Date of Defense 2016-07-19
Page Count 101
Keyword
  • AlN
  • Bragg reflector
  • Laser Annealing
  • Solidly Mounted Filters
  • Abstract This study is to fabricate and characterize the 2.5GHz solidly mounted film bulk acoustic wave filters with laser annealing processes. The effects of laser annealing processes on the frequency response of S21 are analyzed using the network analyzer. In order to obtain the highly (002) oriented piezoelectric AlN varied thin films, various sputtering parameters and laser annealing are varied to improve the crystalline characteristics.
    In order to obtain the SMR filters with high resonant frequencies(2.5~3GHz), varied thickness of AlN thin films as the piezoelectric layers in SMR devices are designed. Besides, top electrodes are adopted as loading effect to modify the 3dB band width (19.69~199.68MHz) of the filters. Finally, the variations of center frequency, 3dB bandwidth and insertion loss for the SMR filters after annealing are investigated.
    Advisory Committee
  • Sheng-Yuan Chu - chair
  • Shih-Jye Sun - co-chair
  • Cheng-Tang Pan - co-chair
  • Chien-Chuan Cheng - co-chair
  • Ying-Chung Chen - advisor
  • Files
  • etd-0801116-112126.pdf
  • Indicate in-campus at 5 year and off-campus access at 5 year.
    Date of Submission 2016-09-01

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