Title page for etd-0730112-231617


[Back to Results | New Search]

URN etd-0730112-231617
Author Bang-Min Wang
Author's Email Address yukimura1819@hotmail.com
Statistics This thesis had been viewed 5350 times. Download 0 times.
Department Materials and Optoelectronic Science
Year 2011
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Improved quality of nonpolar ZnO epitaxial film on modified LiGaO2 substrate by chemical vapor deposition
Date of Defense 2012-06-05
Page Count 83
Keyword
  • epitaxy
  • CVD
  • nitridation
  • nonpolar
  • ZnO
  • Abstract In this work, Nitridated b-LiGaO2 substrates have been used to grow nonpolar a-plane ZnO epitaxial films by a homemade thermal chemical vapor deposition. We control the quality of the films by adjusting the deposition position, growth temperature and oxygen partial pressure. The properties of the ZnO films was investigated by x-ray diffraction(XRD),
    scanning electron microscopy(SEM), atomic force microscopy(AFM), photoluminescence spectra(PL), Raman spectra(Raman) and transmission electron microscopy(TEM).
    The results show that the crystal quality, surface morphology and optical properties of a-plane ZnO films are strongly related to the deposition position and growth temperature. It is also found that the surface roughness of the ZnO films gets more smoothly with increasing the oxygen partial pressure.
    Up to now, ZnO films grown at 700℃ diplay the best crystal quality, the full width at half maximum values of (11-20)ZnO omega scan rocking curve is 0.5°. In comparison with above growth condition, it demonstrate better optical properties by shortening deposition position and increasing growth temperature to 750℃. Room temperature PL spectra exhibit a strong near band edge emission and a negligible green band. Furthermore, low temperature PL spectra is dominated by neutral donor-bound excitons and free electron-to-bound emission.
    From the TEM selected area diffraction patterns and the XRD phi angle scan, the epitaxy relationship between ZnO and LGO is determined as [001]LGO//[0001]ZnO and [100]LGO//[10-10]ZnO. XRD omega-two theta scan and Raman spectra analysis are carried out to characterize the status of the strain in ZnO film is compressive, the reason is illustrate in detail.
    Advisory Committee
  • Der-Shin Gan - chair
  • Jih-Jen Wu - co-chair
  • Liu-Wen Chang - co-chair
  • Ming-Chi Chou - advisor
  • Files
  • etd-0730112-231617.pdf
  • Indicate in-campus at 99 year and off-campus access at 99 year.
    Date of Submission 2012-07-30

    [Back to Results | New Search]


    Browse | Search All Available ETDs

    If you have more questions or technical problems, please contact eThesys