Title page for etd-0729109-112458


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URN etd-0729109-112458
Author Wei Wang
Author's Email Address m963050055@student.nsysu.edu.tw
Statistics This thesis had been viewed 5373 times. Download 2693 times.
Department Electro-Optical Engineering
Year 2008
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Mapping of ESD Induced Defects on LEDs with Optical Beam Induced Current Microscopy
Date of Defense 2009-07-03
Page Count 77
Keyword
  • Confocal microscope
  • Light emitting diodes
  • Electrostatic discharge
  • Optical beam induced current
  • Abstract Optical beam induced current (OBIC) mapping has found wide-spread applications in characterizing semiconductor devices and integrated circuitry. In this study, we have used a two-photon scanning microscope to investigate InGaN light emitting diodes (LED). The defects induced by electrostatic discharge (ESD) can be clearly identified by DC-OBIC images.
    Additionally, we have combined an E-O modulator and a high frequency phase sensitive lock-in amplifier to conduct time-resolved study on the dynamical properties of the LEDs. The defects also exhibit different delay time when compared with the normal parts.
    Advisory Committee
  • Wood-Hi Cheng - chair
  • Shang-Ping Ying - co-chair
  • Fu-Jen Kao - co-chair
  • Tsong-Sheng Lay - advisor
  • Files
  • etd-0729109-112458.pdf
  • indicate in-campus access immediately and off_campus access in a year
    Date of Submission 2009-07-29

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