Title page for etd-0728109-020527


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URN etd-0728109-020527
Author Yung-Shi Chang
Author's Email Address m962030011@student.nsysu.edu.tw
Statistics This thesis had been viewed 5351 times. Download 2800 times.
Department Physics
Year 2008
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Study of AlGaN/GaN quantum structure fabricated by Focus ion beam
Date of Defense 2009-06-26
Page Count 66
Keyword
  • Focused Ion Beam
  • Quantum-ring
  • Spin-Hall
  • AlGaN
  • GaN
  • Abstract We have observed a large spin-splitting in device made of AlxGa1-xN/GaN quantum wires. Based on this observation, we proposed a new spintronic application, the spin-hall quantum-ring interferometer, by the spin-Hall effect, Rashba and Dresselhaus effects. This device we use the ICP Etch System to etch the contact pattern, and then use the Multi-Target Sputter to deposit the protecting layer, and then use the E-Beam Evaporator to make the contact. Finally, using the Focus Ion Beam, we fabricate the quantum-ring and gate successfully. This thesis is focused on discussing the design of the fabrication and try to solve the problem in order to be able to detect the signal of the quantum-ring interferometer at low temperature and high magnetic condition.
    Advisory Committee
  • Jih-Chen Chiang - chair
  • mitch Chou - co-chair
  • Ikai Lo - advisor
  • Files
  • etd-0728109-020527.pdf
  • indicate accessible in a year
    Date of Submission 2009-07-28

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