||In this study, zinc oxide (ZnO) film was used to fabricate the solid mounted resonator (SMR) devices. The Bragg reflectors where achieved by mult-layered Mo and SiO2 with one to four pairs. Various electrode patterns like ellipse, irregular, pentagonal, circular and square were designed and fabricated respectively. The effects of different electrode patterns and different layers of Bragg reflector on the frequency response of SMR devices were investigated. The c-axis preferred orientation of ZnO thin films were obtained by adjusting the sputter pressure and power.|
From the results of frequency response analysis of SMR devices, the devices which had four pairs Bragg reflectors and square shaped electrode pattern had a significant resonance at 2.3 GHz. The results showed that the obtained Mo, SiO2 and ZnO thin films were suitable for the fabrication of SMR devices. However beyond the main resonance, there existed a resonant frequency response at higher frequency. In order to find out the reason, the devices were analyzed by SEM cross section of SMR devices and confirmed mutually with the literatures. According to the experiment at results, the uniformity of thickness of Bragg reflector will influence the frequency response of SMR devices.