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|Type of Document
||Fabrication of solidly mounted resonator using double piezoelectric layers|
|Date of Defense
||In this study, the ZnO/AlN structure is adopted to fabricate the solid mounted resonators (SMR) with double piezoelectric. The variation of the surface roughness of bragg reflector after thermal annealing process is measured by AFM. |
In order to obtain the highly c-axis oriented AlN and ZnO thin films, various sputtering parameters are controlled to improve the crystalline characteristics of AlN and ZnO thin films. Then, double piezoelectric layers are constructed on Bragg reflector of low roughness to fabricate SMR.
Finally, the SMRs with dual mode resonant frequencies can be obtained by using 3.5 pairs SiO2/Mo Bragg reflector and ZnO thin films deposited on AlN thin films of 1 µm. The increase of ZnO thickness can improve return loss. The AlN thin films are adopted as bottom piezoelectric layers which can promote the operation frequency of SMRs.
||Sheng-Yuan Chu - chair|
Meng-Chyi Wu - co-chair
Yeong-Her Wang - co-chair
Chien-Chuan Cheng - co-chair
Ying-Chung Chen - advisor
Indicate in-campus at 5 year and off-campus access at 5 year.|
|Date of Submission