Title page for etd-0724115-145733


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URN etd-0724115-145733
Author Yen-hung Liu
Author's Email Address No Public.
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Department Electrical Engineering
Year 2014
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Fabrication of solidly mounted resonator using double piezoelectric layers
Date of Defense 2015-07-27
Page Count 92
Keyword
  • ZnO
  • AlN
  • Bragg reflector
  • SMR
  • Anneal
  • Abstract In this study, the ZnO/AlN structure is adopted to fabricate the solid mounted resonators (SMR) with double piezoelectric. The variation of the surface roughness of bragg reflector after thermal annealing process is measured by AFM.
    In order to obtain the highly c-axis oriented AlN and ZnO thin films, various sputtering parameters are controlled to improve the crystalline characteristics of AlN and ZnO thin films. Then, double piezoelectric layers are constructed on Bragg reflector of low roughness to fabricate SMR.
    Finally, the SMRs with dual mode resonant frequencies can be obtained by using 3.5 pairs SiO2/Mo Bragg reflector and ZnO thin films deposited on AlN thin films of 1 ┬Ám. The increase of ZnO thickness can improve return loss. The AlN thin films are adopted as bottom piezoelectric layers which can promote the operation frequency of SMRs.
    Advisory Committee
  • Sheng-Yuan Chu - chair
  • Meng-Chyi Wu - co-chair
  • Yeong-Her Wang - co-chair
  • Chien-Chuan Cheng - co-chair
  • Ying-Chung Chen - advisor
  • Files
  • etd-0724115-145733.pdf
  • Indicate in-campus at 5 year and off-campus access at 5 year.
    Date of Submission 2015-08-24

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