Title page for etd-0717112-175258


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URN etd-0717112-175258
Author Ji-Bin Ho
Author's Email Address No Public.
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Department Electro-Optical Engineering
Year 2011
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Development of new thickness measurement system with high lateral resolution
Date of Defense 2012-06-13
Page Count 79
Keyword
  • external cavity laser
  • liquid crystal
  • tunable lasers
  • laser diode
  • Abstract In this thesis, with external cavity semiconductor laser, a high lateral resolution thickness measurement is proposed and demonstrated. The approach is typical an intra-cavity measurement of focused cell thickness by wavelength tuning of an external cavity laser diode. In addition, using blue light of 406nm as laser diode, higher lateral resolution is also observed. Using the proposed thickness method, the lateral resolution and longitudinal resolution have been demonstrated with 20μm and 0.15μm, respectively. We also discuss the feasibility of μm scaled lateral resolution through improvement of laser diode, such as M^2~1.
    Advisory Committee
  • Ann-Kuo Chu - chair
  • Wei-Hung Su - co-chair
  • Yi-Jen Chiu - co-chair
  • Chao-Kuei Lee - advisor
  • Files
  • etd-0717112-175258.pdf
  • Indicate in-campus at 99 year and off-campus access at 99 year.
    Date of Submission 2012-07-17

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