||In this study, the simulation, design and fabrication processes were investigated to manufacture the high-performance solidly mounted resonators (SMR). In the fabrication processes, the Bragg reflector layer was composed of alternating high and low acoustic impedance materials using dual-gun DC and RF sputtering systems. The high and low acoustic impedance materials were used Ti/Mo and SiO2/Mo through various structures of high/low acoustic impedance to influence of frequency response. The result shows, the surface roughness was smoother in SiO2/Mo structure than Ti/Mo structure. Besides, the AlN thin films can grow well piezoelectric characteristic and obtained good resonate frequency. |
In the simulation, the SMR properties were investigated using Mason model equivalent circuit. Various electrode materials, electrode thickness and resonate area can be obtained frequency variation.
Finally, this study provided SMR properties of simulation and fabrication, including Bragg reflector materials and high c-axis orientation AlN thin film influenced by resonate frequency.