Title page for etd-0703103-135836


[Back to Results | New Search]

URN etd-0703103-135836
Author Jui-Chuan Wu
Author's Email Address m9031671@student.nsysu.edu.tw
Statistics This thesis had been viewed 5335 times. Download 4099 times.
Department Electrical Engineering
Year 2002
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title The Properties of Tantalate Modified Lithium Niobate Pyroelectric Thin Film Detectors Prepared by the Sol-Gel Processes
Date of Defense 2003-06-26
Page Count 87
Keyword
  • thin film
  • sol-gel method
  • pyroelectric
  • tantalate lithium
  • detectors
  • niobate lithium
  • Abstract The Ta-modified niobate lithium [LiNb1-xTaxO3, abbreviated to LNT] thin films were deposited on Pt/Ti/SiO2/Si substrates by spin coating with sol-gel technology and rapid thermal processing in this thesis. 1,3 propanediol was used as solvent to minimize the number of cycles of spin coating and drying processes to obtain the desired thickness of thin film. By changing the Ta content (x=0~1), the effects of various processing parameters on the thin films growth are studied. The effects of various Ta content on the response of pyroelectric IR detector devices are studied also.
    Experimental results reveal that the Ta content will influence strongly on grain size, dielectricity, ferroelectricity and pyroelectricity of LNT thin films. With the increase of Ta content, the grain size of LNT thin film decreases slightly, and highly c-axis orientated LNT films have been obtained for x=0.2. With the increase of Ta content, The relative dielectric constant of LNT thin film increases from 33 up to 62. The dielectric loss (tand) increases from 0.00374 to 0.00686,Coercive Field (Ec) decreases from 81.09KV/cm to 32.07KV/cm, and Remanent polarization (Pr) decreases from 8.48 mC/cm2 to 2.2 mC/cm2, pyroelctric coefficient (g) increases from 2.76´10-8 C/cm2K up to 4.51´10-8 C/cm2K with an increase of Ta content. In addition, the results also show that the LNT thin film possesses the largest figures of merit Fv (2.66×10-10 Ccm/J) and Fm (2.57×10-8 Ccm/J) at the heating temperature of 700℃ and Ta content of 20mol%. The voltage responsivities (Rv) measured at 70 Hz has a largest value of 7020 V/W with the Ta content of 20mol%. The specific detectivity (D*) measured at 200 Hz has the maximum value of 7.76×107 cmHz1/2/W with the Ta content of 20mol%. The results show that LNT(20) pyroelectric thin film detector exists both the maximums of voltage responsivity and specific detecivity. Therefore, optimizing the conditions of this study, LNT(20) thin film will be the most suitable for IR detector application.
    Advisory Committee
  • Yeong-Her Wang - chair
  • Long Wu - co-chair
  • Cheng-Fu Yang - co-chair
  • Mau-Phon Houng - co-chair
  • Ying-Chung Chen - advisor
  • Files
  • etd-0703103-135836.pdf
  • indicate access worldwide
    Date of Submission 2003-07-03

    [Back to Results | New Search]


    Browse | Search All Available ETDs

    If you have more questions or technical problems, please contact eThesys