Title page for etd-0701100-151756


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URN etd-0701100-151756
Author Bor-Tzong Tsay
Author's Email Address No Public.
Statistics This thesis had been viewed 5351 times. Download 1519 times.
Department Electrical Engineering
Year 1999
Semester 2
Degree Master
Type of Document
Language English
Title Lift-Off of ZnSe-based Epilayer and Epitaxial growth of ZnSxSe1-x on it by LP-OMVPE
Date of Defense 2000-06-26
Page Count 91
Keyword
  • ELO
  • LP-OMVPE
  • ZnSSe-regrown
  • Abstract ABSTRACT
    ZnSe-based materials have excellent characteristics for blue light emitting devices. So the substrates used for the growth of ZnSe-based alloys are considered from three points of (1) lattice match, (2) thermal match, and (3) interdiffusion.
    By replacing GaAs or GaP wafers by ZnSe substrates can avoid disadvantages of heteroepitaxy caused by lattice constant mismatch, by differential thermal expansion coefficients between substrate and epilayer. But the ZnSe substrate is cost too much. And it is not easy to achieve. So we choose the other way to get the substrate by Epitaxial Lift-Off (ELO). Another reason for this study is that the light extraction efficiency of these devices is limited by the optically absorbing GaAs substrate. So it can be improved by replacing GaAs with a new metal/glass substrate. The metallic interlayer can be used not only as an adhesive, but also as the reflective mirror to reflect light in the wafer-bonded LED structure.
    In this study, ZnSe-epliayer have been successfully lifted-off from GaAs by etching solution (NaOH(1M): H2O2(30%) = 4:1 or NH4OH(30%): H2O2(30%) = 9:1) and adhered it onto Indium/glass. From PL spectra, the PL intensity and broad band increases after ELO. The broad band can be decreased by surface trimming of citric etching solution (C6H8O7: H2O: H2O2 = 30g: 30ml: 10ml). This etching process is helpful in regrown ZnSe-epilayer. Regrowth of ZnSSe with [H2Se]/[H2S]=4 and II/IV=12.5, shows a NBE emission at 432nm with a FWHM of 26.6 meV at 77K PL spectrum. And the DAP is disappear after regrown. It means that the quality of ZnSe-epilayer becomes better after regrown.
    Advisory Committee
  • Chung-Cheng Chang - co-chair
  • Wen-Tai Lin - co-chair
  • Wei-Chon Hun - co-chair
  • Ming-Kwei Lee - advisor
  • Files
  • 畢業論文.PDF
  • indicate access worldwide
    Date of Submission 2000-07-01

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