Title page for etd-0627115-164545


[Back to Results | New Search]

URN etd-0627115-164545
Author Hsiao-Cheng Chiang
Author's Email Address No Public.
Statistics This thesis had been viewed 5336 times. Download 180 times.
Department Electro-Optical Engineering
Year 2014
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Electrical Analyses and Physical Mechanisms of Environment Instability in Passivated InGaZnO Thin Film Transistors
Date of Defense 2015-07-22
Page Count 78
Keyword
  • hydrogen ion diffusion
  • negative bias instability
  • moisture
  • InGaZnO
  • Thin Film Transistor
  • Abstract Recently, more large size LCDs are produced one after another. The performance of Thin Film Transistors needs to be greater than before. Amorphous Metal Oxide TFT has some advantages, for example, high carrier mobility, good uniform, and low process temperature. These advantages make metal oxide TFT become a popular study and the most popular active layer material in metal oxide TFT is InGaZnO TFTS. But unpassivated TFT’s threshold voltage is easy to be effected by environment. So, Passivation is very important for our device.
      In this Investigation, we give negative bias on our passivated a-IGZO TFT device in moisture environment. However, we discover that TFT’s Threshold voltage have a shift in positive direction. On the other hand, we also discuss TFT passivated by organic material under high temperature negative bias. The organic passivation truly improves instability in moisture environment, but we observe that TFT’s threshold voltage shift in negative direction under high temperature environment. We think that the degradation under moisture environment is caused by ammonium hydroxide molecule adsorption which on the passivation. And the TFT’s threshold voltage degradation under high temperature environment is created by the hydrogen ion thermal diffusion which in the organic passivation. In our study, we will well discuss these two degradation physical mechanisms.
    Advisory Committee
  • Tsung-Ming Tsai - chair
  • An-Kuo Chu - co-chair
  • Ting-Chang Chang - advisor
  • Chao-Kuei Lee - advisor
  • Files
  • etd-0627115-164545.pdf
  • Indicate in-campus at 3 year and off-campus access at 3 year.
    Date of Submission 2015-07-27

    [Back to Results | New Search]


    Browse | Search All Available ETDs

    If you have more questions or technical problems, please contact eThesys