Title page for etd-0624116-031042


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URN etd-0624116-031042
Author Ping-Chien Chang
Author's Email Address No Public.
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Department Electro-Optical Engineering
Year 2015
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Wafer-scale subwavelength grating formation and its photonic applications
Date of Defense 2016-07-22
Page Count 131
Keyword
  • liquid crystal alignment
  • subwavelength grating reflector
  • two-beam laser interference lithography system
  • metal grating polarizer
  • reflective color filters
  • Abstract This thesis focuses on the modification of our mirror-tunable laser interference system for short-period (200~400 nm) grating formation over a large sample area with superior uniformity. Experimental results indicate that the resist gratings have a fill factor variation of < 1.3%, a thickness variation of < 3%, and a grating period variation of < 0.15%. Such a superior grating structure then serves as the building block to realize RGB reflective filters and wire-grid optical polarizers. The gratings are also applied for liquid crystal alignment on a flexible substrate. The RGB reflective filter is based on a guided-mode resonance mechanism and the grating is made of high-refractive-index silicon material. According to the rigorous coupled-wave analysis, the reflecting wavelength of a Si grating can be adjusted by changing the grating period. A reflection bandwidth of > 80 nm and a reflectivity of > 75% are predicted and experimentally demonstrated. Wire-grid optical polarizer is realized by oblique depositing Aluminum atop the resist gratings. The resultant optical polarizer enables an optical transmission of 60% and an extinction ratio of about 40:1. The alignment of liquid crystal by grating allows an optical transmission of up to 95%. After assembling RGB reflective filter with standard liquid crystal cell, we show that color mixing can be achieved by adjusting the voltage applied to the cell. We believe that the proposed all-grating-based reflective display concept could be a high-efficiency and low-cost choice.
    Advisory Committee
  • San-Liang Lee - chair
  • Tsung-Hsien Lin - co-chair
  • Wei Lin - co-chair
  • Chia-Chien Wei - co-chair
  • Yung-Jr Hung - advisor
  • Files
  • etd-0624116-031042.pdf
  • Indicate in-campus at 5 year and off-campus access at 5 year.
    Date of Submission 2016-08-10

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