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URN	etd-0624114-162927
Author	Bo-Tsang Chen
Author's Email Address	No Public.
Statistics	This thesis had been viewed 5590 times. Download 0 times.
Department	Electro-Optical Engineering
Year	2013
Semester	2
Degree	Master
Type of Document
Language	zh-TW.Big5 Chinese
Title	Novel Nonlinear Waveguide Material Tantalum Pentoxide & MicroRing Fabrication
Date of Defense	2014-07-22
Page Count	115
Keyword	Waveguide Micro-Ring devices Ta2O5 Tantalum pentoxide Magentron sputter Four-wave mixing
Abstract	In this work, high optical properties were grown by non-toxic magnetron sputter system, using XRD measurements and Micro-Raman spectrum, the crtstalline state of Ta2O5 were confirmed. The refractive index of the Ta2O5 thin film was around 2.1~2.08 and the extinction coefficient is extremely low. The optimized surface roughness as low as 0.12nm was obtained as annealing with three hours at temperature of 650C, and the profile of cross section is extremely dense with no pinhole observed. We further estimated the crack density by using 30k X SEM image and no cracks were found. The n2 value of the thin film is as high as 3.5×10-12 cm2/W, Ta2O5 provide an novel option for FWM-OPO. In our calculation, we estimated the dispersion contribution from bulk material and waveguide. By verified the past work by other team data to confirm the correctness of our motheds.We also calculate in our Ta2O5 case and obtained the dispersion curve. In the fabrication process, we haven’t obtained the best quality of Micro-Ring structure.As the result, the hint were proposed to optimize the quality of our devices.
Advisory Committee	An-Kuo Chu - chair Yuan-Yao Lin - co-chair Yi-Jen Chiu - co-chair Chao-Kuei Lee - advisor
Files	etd-0624114-162927.pdf Indicate in-campus at 99 year and off-campus access at 99 year.
Date of Submission	2014-09-05

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