Title page for etd-0619116-152946


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URN etd-0619116-152946
Author Sheng-cheng Pi
Author's Email Address kiouy1001@gmail.com
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Department Electro-Optical Engineering
Year 2015
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Ta2O5 optical waveguide filters on silicon substrates for Si photonics
Date of Defense 2016-07-13
Page Count 67
Keyword
  • Optical waveguide filters
  • Ta2O5
  • electron beam lithography
  • RF-magnetron sputtering
  • Abstract In this thesis, Tantalum pentoxide (Ta2O5) waveguide filter is proposed for Si photonic. Ta2O5 was prepared using the RF-magnetron sputtering system on silicon substrates with 3μm thick thermal oxide.The waveguide filter was obtained by e-beam lithography for patterns definition and reactive ion etching for ridge formation. In addition, we used 3D Lumerical simulation to calculate the Bragg wavelength of the grating structare. On the other hand, we will also discuss reflective coefficient of Ta2O5 waveguide filters.
    The transmission spectrum of the Ta2O5 waveguide filter was measured using a home-made optical system with a broadband ligth sourse.The spectrum range of light sourse is from 1480nm to 1600nm. As a result, the fabricated waveguide filter exhibited a Bragg wavelegth of 1528nm and a spectral linewidth of 5.13nm. For a 200μm long waveguide filter, the reflectivity of the device is larger than 75%.
    Finally, we used thermoelectric cooler to detect the thermal stability of optical waveguide filters. The temperature change from 10oC to 100oC. The results showed that the temperature change from 10oC to 100 oC, the Bragg wavelength shifted only 22 pm(from 1528.046nm to 1528.068nm). Ta2O5 optical waveguide filters with a high thermal stability were obtained.
    Advisory Committee
  • Ting-Chang Chang - chair
  • Chao-Kuei Lee - co-chair
  • Yung-Jr Hung - co-chair
  • Ann-Kuo Chu - advisor
  • Files
  • etd-0619116-152946.pdf
  • Indicate in-campus at 5 year and off-campus access at 5 year.
    Date of Submission 2016-07-21

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