||During the manufacturing process of semiconductor assembly many pollutants come with products, especially volatile organic compounds(VOCs). As VOCs with features such as penetrable, lipophilic and volatile, they can cause adverse health effects by contacting with skin and respiratory system. Key symptoms associated with exposure to VOCs include eye irritation, allergic skin reaction and nose and throat discomfort. For the environment, most of the VOCs have lower odor threshold. Only a small amount of VOCs can produce odor which leads to environmental problems and personnel discomfort. In this study, we used condensation method with washing technology to remove VOCs and organic odors. The condensation-washing device was made of stainless steel body and coated with an insulation layer. The internal device was composed of two stainless steel spray and two stainless steel cooling coils. The use of gas condensate and vapor absorption achieves the separation of some of the ingredients in the liquid.|
The results showed that (1) For the organic compounds with low-boiling point such as Isopropyl Alcohol, Acetone, Trimethylamine, Dimethyl sulfide, Toluene and 2-methoxy-Propane, the removal efficiency of isopropyl alcohol and trimethylamine was more than 90%, however the removal efficiency of dimethyl sulfide, toluene, 2-methoxy-Propane and acetone was unsatisfying. Although the total removal rate was up to 90%, the rates showed between different compounds were uneven; therefore removal of low-boiling point organic compounds using this method remains further studies. (2) For the organic compounds with high-boiling point such as dimethyl sulfoxide (DMSO) and ethanolamine (MEA), the removal efficiency of dimethyl sulfoxide (DMSO) was more than 98%, while the concentration of ethanolamine (MEA) was too low to be detected, which was unable to obtain its removal efficiency. However, according to the principle of high-boiling compounds with higher absorption, its removal efficiency should be similar with dimethyl sulfoxide (DMSO), therefore, we concluded that condensation-washing equipment can proved high removal efficiency for high-boiling organics.