Title page for etd-0519117-121626


[Back to Results | New Search]

URN etd-0519117-121626
Author Tzu-hui Lin
Author's Email Address No Public.
Statistics This thesis had been viewed 5572 times. Download 164 times.
Department Electro-Optical Engineering
Year 2016
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Effect of surface passivation on carrier lifetime of textured crystalline silicon wafers
Date of Defense 2017-06-14
Page Count 43
Keyword
  • Surface passivation
  • Carrier lifetime
  • Anisotropic
  • Supercritical CO2
  • Abstract The purpose of this study is to investigate the surface carrier lifetime of a texturized n-type (100) Si wafer after surface passivation. The surface texturization on the Si wafer using isopropanol-free alkaline solution was performed and compared with that of using conventional isopropanol alkaline etchant. Texturization conditions, such as concentration of etchant, etching temperature, and etching time were optimized to reduce optical reflection of the Si surface.
    The surface passivation of the Si surface was first formed by growing a 1 nm thick SiOx used the supercritical carbon dioxide (SCCO2) fluid with H2O2 additive. We varied the operation pressure and time of the SCCO2, together with H2O2 concentration to optimize the performance of the SiOx passivation layer. After growing the SiOx thin film, we deposited a 30 nm thick a-Si by VHF PECVD to further improve the defects cause by the silicon dangling bond on the Si surface.
    The weighted reflectivity and surface coverage of pyramid of the textured Si substrates of better than 15% and 90% were achieved. On the other hand, lifetime of the carriers was measured by a home-made photoconductance system. The effective carrier lifetime (@1015 cm-3) of texturized silicon substrate with SiOx surface passivation was 6 µs. The carrier lifetime was further increased to 26.9 µs when SiOx and a-Si double-layered passivation was used.
    Advisory Committee
  • Ting-Chang Chang - chair
  • Chao-Kuei Lee - co-chair
  • Wei-Chen Tien - co-chair
  • Ann-Kuo Chu - advisor
  • Files
  • etd-0519117-121626.pdf
  • Indicate in-campus at 2 year and off-campus access at 2 year.
    Date of Submission 2017-06-19

    [Back to Results | New Search]


    Browse | Search All Available ETDs

    If you have more questions or technical problems, please contact eThesys