||This study use the external electric field to assist fiber laser (1064nm) drilling for Al2O3 ceramic substrate, and use the preheating method to assist laser scribing. After using the theory and simulation analysis, we adjust the different parameters and design different electric field structure, then study the quality of the hole after drilling, such as roundness, the size of coke area, debris height, etc. According to the experimental result, we summarize the best electric field parameters, and design a module which can be applied to the real laser drilling machine. On laser scribing, we use the heating platform to raise the temperature of the substrate, then we test the minimum laser power that can scribe the substrate. We obtain the improved level of the laser application efficiency, then design a module which can be applied to the real laser scribing machine.|
The structure of the external electric field assisted laser drilling is set up by two electrodes around the laser drilling area, and a voltage is applied. The principle is that while laser drilling, a large amount of plasma plume will be produced. The plasma plume will absorb and scatter the laser light. Since the plasma is composed of many charged particles, apply an electric field can effectively attract the charged particles and leave them from processing area. The quality of surface and processing efficiency will be improved. It also can attract the molten Al2O3 and leave it from the hole, improve the debris removal efficiency. On laser scribing, raising the temperature of the substrate can enhance the absorption of the light, then the occurrence of scribe break will be reduce.
The experimental results show that the external electric field assisted laser drilling can indeed improve debris removal efficiency and reduce the coke area of surface. Raising the temperature also help to improve the efficiency of laser application.