Title page for etd-0107109-175245


[Back to Results | New Search]

URN etd-0107109-175245
Author Hong-Ruei Chen
Author's Email Address m953020083@student.nsysu.edu.tw
Statistics This thesis had been viewed 5350 times. Download 1766 times.
Department Mechanical and Electro-Mechanical Engineering
Year 2008
Semester 1
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Fabrication and characteristics of diamond PN junction device
Date of Defense 2008-07-30
Page Count 76
Keyword
  • I-V rectification property
  • PN junction
  • CVD diamond
  • CL spectroscopy
  • Abstract This work has employed the Micro-wave Plasma enhanced Chemical Vapor Deposition (MPCVD) method to fabricate diamond PN junction device. The n+ <111> orientation single-crystal silicon has used as substrates. P-type diamond layer is doped with B(OCH3)3 and the N-type diamond layer is doped with ammonia. The surface structure of diamond film has been observed by scanning electron microscope; and the device rectification property of a PN junction has measured by current-voltage characteristic. The carrier density and mobility of diamond films have been analyzed by Hall measurement. Furthermore, the Cathodoluminescence (CL) spectroscopy showed the defect spectra in diamond PN junction. The N-type diamond film and P-type diamond film have deposited at temperature of 800 ℃, for 30 minutes and 90 minutes, respectively. The process CVD has performed in the same chamber continually. A I-V curve of sample showed the set on positive voltage 0.5 V and the reverse breakdown voltage of 6 V. Further, CL results revealed a peak at 285 nm (4.4 eV), which represents the CVD diamond band and the other one is at 500 nm (2.5 eV), which stands for donor-acceptor recombination from defect in these diamond films.
    Advisory Committee
  • none - chair
  • none - co-chair
  • Tai-Fa Young - advisor
  • Files
  • etd-0107109-175245.pdf
  • indicate in-campus access immediately and off_campus access in a year
    Date of Submission 2009-01-07

    [Back to Results | New Search]


    Browse | Search All Available ETDs

    If you have more questions or technical problems, please contact eThesys