Title page for etd-0009117-224340


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URN etd-0009117-224340
Author Sheng-Min Wu
Author's Email Address No Public.
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Department Materials and Optoelectronic Science
Year 2016
Semester 1
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Control of Growth Orientation of ZnO Films on (200) γ-LiAlO2 Substrate by Chemical Vapor Deposition
Date of Defense 2016-12-15
Page Count 67
Keyword
  • LiAlO2
  • Chemical Vapor Deposition
  • epitaxy film
  • ZnO
  • Abstract In this thesis, epitaxial (0002) and (10-10) ZnO films were grown by chemical vapor deposition
    (CVD) method on LiAlO2 (LAO) (200) substrate. We used Zinc Acetylacetonate as our precursor. High
    purity oxygen and nitrogen were used as reaction gas and carrier gas, respectively.
        After CVD reaction was finished, we utilized scanning electron microscope, x-ray diffractometer,
    atomic force microscope, photoluminescence spectroscope, raman spectroscope, transmission electron
    microscope to analyze ZnO films’ characteristics such as surface topography, crystal structure, crystal
    quality, surface roughness, optical properties, residual stress and crystal orientation.
        We set growth temperature, growth pressure and growth time as independent variables in our
    experiment. And then, observing the growth changes of ZnO films. When the growth temperature was
    between 550°C and 650°C, c-ZnO and m-ZnO were coexisted. The XRD signal of c-ZnO was weaker
    at 650°C, which showed the growth of c-ZnO was obviously restrained. At 650°C, we altered the
    growth pressure to 300torr, and we got pure m-ZnO films It indicated that the growth of c-ZnO was
    also restrained by pressure. Last, the more growth time, the better crystallinity.
        It was worth to mention that the experiment was improved by using the magnet to control the
    starting and ending position for the quartz boat precisely. The surface roughness, optical properties
    and crystallinity(the growth at 750°C, 300torr, and 180min, we got 101 arcsec for the value of FWHM
    of rocking curve) were enhanced.
    Advisory Committee
  • Liu-Wen Chang - chair
  • Li-Wei Tu - co-chair
  • Da-Ren Hang - co-chair
  • Ming-Chi Chou - advisor
  • Files
  • etd-0009117-224340.pdf
  • Indicate in-campus at 2 year and off-campus access at 2 year.
    Date of Submission 2017-01-10

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